Bio-Rad PT7125 Barrel Plasma Etcher Technical Specification

Process gas Oxygen
Chamber Dimensions10 cm diameter x 15 cm long
Operating frequency13.56 MHz
Maximum Power150W
Vacuum MeasurementPirani Gauge
Vacuum PumpLeybold Trivac D 10 E (10 m3 h-1)
Base Pressure4 x 10-2 mbar
Leak Rate< 10-5 mbar ls-1
 
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