| Light Source | Single wavelength: He/Ne laserSpectroscopic: quartz halogen lamp (> 400 nm) or Xe Arc lamp (> 200 nm) |
| Polarisers | calcite crystal that can be switched at 1.5 Hz to eliminate offsets |
| Birefringence Modulator | 3 component high stability design, susprasil optical element with transmission to 200 nm, 50 kHz modulation frequency |
| Detector | End-on photomultiplier with gain control that can be set to track a preset DC current for large intensity variations |
| Beam Size | 1 mm Diameter or larger depending upon light source. |
| Table | Ultra high rigidity table with incident and reflection arms in vertical plane. Arms separately driven by stepping motors with angular resolution of 1/20 degrees. Table allows rotation of arms through 360°. Closest angle between arms 20°. 140 mm free diameter in center of table. XYZ adjustable sample mount |
| Electronics | Dual analog lock-in amplifier at 50 kHz and 100 kHz frequencies provides simultaneous reading of Re(r) and Im(r) |
| Sensitivity |
Im(r), Re(r) < 10-5 at 1 s response time (reflection from glass). Sensitivity is reduced at shorter time constants (variation is roughly proportional to t-1/2) |
| Speed | The Fastest response time is 1 ms |
| Computer Control | Software implemented as extension to the IgorPro data analysis package by WaveMetrics running on Windows 2000. A Microcontroller acts as hardware interface and data logger for true real-time operation. The control software allows simultaneous instrument control and on-line data analysis. |
| Data Analysis | Simulations of ellipticity are provided for layers on substrates, as a function of angle of incidence, layer thickness, substrate and film optical anisotropy.SCI Film Wizard is also available for modeling ellipsometric data. |